Session Index

Thin-Film Technology and Optical Engineering

Poster Session II
Saturday, Dec. 8, 2018  10:45-12:30
Presider: Hsin-Chieh Yu, Chun-Yuan Huang
Room: R111
Notes:
Paper No.  2018-SAT-P1002-P001
Cheng-Chung Jaing
Design and Implementation of Wide-Angular Broadband Antireflection Coatings
Wei-Cheng Hsu;Chia-Hsien Wu;Chen-Yu Chang;Shi-Chun Zhou;Wei-Li Wan;Cheng-Chung Jaing;Bing-Mau Chen;Yeuh-Yeong Liou;Pang-Shiu Chen

The wide-angular broadband AR coatings composed of Ta2O5 and MgF2 films prepared by electron-beam evaporation at a substrate temperature of 200 degrees C were designed and fabricated. The optical properties of MgF2 films at different deposition rates were investigated with a spectrophotometer and varied angle of incidence spectroscopic ellipsometer.

 
 
Paper No.  2018-SAT-P1002-P002
Chih-Chiang Yang
Electric Properties of Magnesium doped Indium oxide Thin-film transistor
Chih-Chiang Yang;Kuan-Yu Chen;Yan-Kuin Su;Jian-Long Ruan;Cheng-Chung Lin

In this work, the thin film transistors with the magnesium indium oxdie thin film as the actively layer was investigated. The channel layer was fabricated by using an RF magnetron sputter system. The threshold voltage was 1.7 and the subthreshold swing was 3.85 V/ decade.

 
 
Paper No.  2018-SAT-P1002-P003
Yuan-Cheng Chen
Measurement of Surface Contour and Bow of Sapphire Wafer Using Fringe Reflectometry and Fast Fourier Transform Method
Yuan-Cheng Chen;Chuen-Lin Tien;Hong-Yi Lin;Bo-Hao Peng

This paper presents the measurement of surface deformation and bow of sapphire wafer by using fringe reflectometry combined with fast Fourier transform method. The 4-inch and 6-inch sapphire wafers were measured by our proposed method. The surface contour and bow of sapphire wafers can be obtained.

 
 
Paper No.  2018-SAT-P1002-P004
Kuo Shou-Yi
Effects of substrate geometry on CZTS thin film grown by two-step method
Hsu Guo-Zhan;Lin En-Yu;Yang Jui-Fu;Lai Fang-I;Kuo Shou-Yi

In this work, we have successfully deposited CZTS thin film by the two-step process. Moreover, the influence of substrate geometry on structural and optical properties have been discussed in detailed.

 
 
Paper No.  2018-SAT-P1002-P005
Chien-Yu Lai
Photoluminescence Study of Annealed MgZnO:Er Diode
Chun-An Chen;Chien-Yu Lai;Che-Chi Lee;Mu-Chun Wang;Wen-Jen Lin;Kuo-Jen Chang;Hsin-Hui Kuo;David Jui-Yang Feng;Ming-Chang Shih;Wen-How Lan

The annealing effect of MgZnO:Er diode on p-Si substrate prepared by spray pyrolysis was studied with the temperature dependent photoluminescence analysis. After 600oC annealing, the Er-related emissions were characterized. And the redistribution of zinc interstitial related and oxygen vacancy states occurred for diode after 1000oC annealing.

 
 
Paper No.  2018-SAT-P1002-P006
Cheng-Chung Jaing
Optical and Mechanical Properties of Thin Evaporated Titanium Films from 10 nm to 50 nm
Wei-Chen Chiang;Kuo-Ting Liao;Jen-Hao Wen;Wei-Ming Hsu;Shi-Chun Zhou;Cheng-Chung Jaing;Bing-Mau Chen;Yeuh-Yeong Liou;Pang-Shiu Chen

The thickness-dependent optical and mechanical properties of Ti films from 10 nm to 50 nm prepared by electron-beam evaporation at a substrate temperature of 25 degrees C were investigated with spectrophotometer, spectroscopic ellipsometer, and phase-shifting Fizeau interferometer, respectively.

 
 
Paper No.  2018-SAT-P1002-P007
Kuan-Chen Chen
A simple method for simultaneously measuring the characteristic parameters of wave plate
Kuan-Chen Chen;Chien-Hung Yeh;Jiun-You Lin;Jing-Heng Chen;Kun-Huang Chen

This paper proposes a simple method for simultaneously measuring the characteristic parameters of wave plates. It is based on the radially polarized beams. To validate the proposed method, the half-wave plate was measured experimentally. This method has a simple structure and ease of installation and operation.

 
 
Paper No.  2018-SAT-P1002-P008
Pei-Yu Wu
Residual Stress Effects on Thermochromic VO2 and VO2/TiO2 Films Prepared by High Power Impulse Magnetron Sputtering (HiPIMS)
Pei-Yu Wu;Chien-Jen Tang;Wei-Hsuan Hsu;Ching-Tang Li;Chuen-Lin Tien

The study investigated the relationship between crystalline phase and residual stress, and the influence of titanium dioxide anatase (A) on vanadium dioxide thermochromic ability deposited by high power impulse magnetron sputtering. The optical transmittance and residual stress of VO2 and VO2/TiO2 films were analyzed.

 
 
Paper No.  2018-SAT-P1002-P009
Yi-Ren Sun
Birefringent Container Coupling with Prism for Liquid Concentration Measurements
Ruey-Ching Twu;Kai-Hsuan Li;Yi-Ren Sun

A birefringent container coupling with prism is proposed for the liquid concentration measurements. The achievable resolutions of RI and concentration are 6.2×10-6 RIU and 39 ppm, respectively. The disposable and cheap container has potential to provide simple and repeatable measurements for some oil-related products and organic chemicals.

 
 
Paper No.  2018-SAT-P1002-P010
Wei-Chih Hsu
Using Thermal Annealing Method Growth Copper Oxide Nanowires applied to gas sensing
Chi-Feng Lin;Wei-Chih Hsu;Bo-Rong Zheng;Yi-Hsun Lee;Hsieh-Cheng Han;Tian-You Cheng

In this study, we fabricated the CuO nanowires with thermal annealing method in two times, the structures were observed with optical microscope. The I-V characteristics were measured to analysis the working voltage, then gas sensing. The experiment results show that the secondary annealed CuO nanowires has good response to gas.

 
 
Paper No.  2018-SAT-P1002-P011
Tsai Wei Lung
Reduced Panel yellowing by SiOxNy films
Tsai Wei Lung

The plane yellowing was reduced by using SiOxNy films. Turning verify of mixture gas ratio produced different refractive index value of SiOxNy films. As a result of optical characteristics, the TFE structure array was optimized for transmission and reducing b* value so that the panel visual quality was improved.

 
 
Paper No.  2018-SAT-P1002-P012
Chin-Jen Chung
Effects of annealing on the properties of CTSe thin film
Chin-Jen Chung;Shih-Chang Shei

CTSe nanoink was synthesized by solvent-thermal reflux based on polyetheramine (D400). CTSe thin film photovoltaic absorber layers were fabricated via doctor’s blade method on soda-lime glass (SLG) substrate. Followed by annealing in a quartz furnace under nitrogen pressure for 20, 40, 60 mins at 450℃.

 
 
Paper No.  2018-SAT-P1002-P013
Wei-Fan Dang
Diluted Magnetism on Mn doped ZnO:N Thin Films by Ultrasonic spray pyrolysis deposition
Wei-Fan Dang;Yao Te Wang

The Mn-N codoped p-type zinc oxide thin films were deposited by ultrasonic spray pyrolysis to investigate the effect of the dopant concentration on the diluted magnetism.From the hysteresis curves measured by SMOKE, we obtained a great ferromagnetism for the sample doped at 7at% of Mn on ZnO:N film.

 
 
Paper No.  2018-SAT-P1002-P014
Hung-Chun Lin
ZnO:N Films prepared by ion-beam sputtering deposition with various oxygen partial pressure
Hung-Chun Lin;Chih-Hsuan Shih;Yu-Chung Wang;Jin-Cherng Hsu

ZnO:N films were fabricated by using ion-beam sputter deposition (IBSD) technique with nitrogen working gases in this study. The nitrogen ion sputtered the Zn target under a well-controlled various oxygen partial pressure such that ZnO:N films were formed. A transparent p-type ZnO:N film was obtained at optimum oxygen partial pressure.

 
 
Paper No.  2018-SAT-P1002-P015
Ting-Wei Lin
Properties of Cu-doped ZnO Thin Films by Pulsed Laser Deposition
Ting-Wei Lin;Zih-Jie Lin;Kang Chi;Song-Ting Liu;Wei-Kuan Hung

In the experiment, oxygen and nitrogen were used as backgrounds to deposit copper-doped zinc oxide film at a substrate temperature of 600 ̊C. According to Hall measurement analysis, the carrier concentration and mobility of the film were increased by copper-nitrogen co-doping and special cooling method, and the resistivity was decreased.

 
 
Paper No.  2018-SAT-P1002-P016
Huang Hui Yuan
The electrical properties of Ag doped ZnO:N thin films prepared by ultrasonic spray pyrolysis on silicon substrates
Huang Hui Yuan;Wang Yao Te

This work focused on the fabrication of p-type ZnO thin films by Ag–N co-doping using spray pyrolysis technique on silicon substrates. Hall measurements revealed that Ag–N co-doped ZnO thin films were p-type semiconductors and the highest mobility of 30.9cm2/vs occurred of 1at% of Ag doped ZnO: N film.

 
 
Paper No.  2018-SAT-P1002-P017
Yu Cheng Syuan
The study of diluted magnetism on Co-N co-doped ZnO thin films
Yu Cheng Syuan;Wang Yao Te

In this experiment, Co-N co-doped ZnO thin films had fabricated by ultrasonic spray pyrolysis. The effects of different concentrations of Co dopant on the magnetic properties of thin films have studied in this paper. When the films doped with 5 at% Co,it possessed the highest coercivity of 367mT.

 
 
Paper No.  2018-SAT-P1002-P018
Shung Ying Liao
Fabrication of SiGe Thin Films by Annealing System
Shung Ying Liao;Sheng-Wen Chen;Gui-Sheng Tseng;Sheng-Hui Chen

The germanium films was sputtered on the silicon substrate by RF magnetron sputtering. After the germanium films was annealed for two hours, the Silicon from the Si substrate will diffuse with the Germanium. This study will analyze and study of germanium thin films by an optical measurement method.

 
 
Paper No.  2018-SAT-P1002-P019
Li-Hong Yang
Transparent ZnO nanorods thin film transistors
Li-Hong Yang;Wei-Chen Tu;Ming-Yi Lin

Well-aligned vertically oriented zinc oxide (ZnO) nanorod Arrays on polymethylmethacrylate (PMMA) thin film are fabricated by sol-gel and hydrothermal method. Solution-processed ZnO thin films not only possess low resistivity but also high transmission. Following, transparent thin film transistors (TFT) were fabricated by using ZnO nanorod arrays as channel layer.

 
 
Paper No.  2018-SAT-P1002-P020
YiCheng Wang
Zno Micro/Nanostructures Grown on Sapphire Substrates Using Low-Temperature Vapor-Trapped Thermal Chemical Vapor Deposition: Structural and Optical Properties
YiCheng Wang;Po-Sheng Hu;Cheng-En Wu;Guan-Lin Chen

XRD spectra present the dominant peaks along crystal planes of (002) and (101) as the main direction of crystallization. different degrees of structural correlation as functions of growth duration and the spatial gradient of temperature

 
 
Paper No.  2018-SAT-P1002-P021
Shu-Ming Yang
Using Silver-Based SPR Fiber Sensor to Monitor the Nano-Gold Film Thickness in-Situ
Shu-Ming Yang;Wei-Han Chen;Woo-Hu Tsai

In this paper, the high sensitivity and the ability real time measurement of the silver-based surface plasmon resonator fiber sensor has been carried out for the gold nanometric thin film thickness monitoring in-situ. The experimental results show that the sensitivity of the SPR sensing can reach 0.39 (nm Au/nm wavelength).